Uncertainty analysis for design and optimization of a micro Coriolis mass flow sensor

The purpose of this paper’s theoretical study is to evaluate the relative influence of structure parameters on the inherent frequency and sensitivity of the micro Coriolis mass flow sensor. Structure parameters of the micro flow sensor play an important role in applications of accurate measurements. But these are not precisely obtained due to the manufacturing error. In this paper, the inherent frequency and sensitivity of the micro Coriolis mass flow sensor driven by non-contact capacitance excitation are established, respectively. The sample-based stochastic model is established considering uncertainty distributions of structure parameters. The relative influences are revealed by the results of simulation experiments and the key influence parameters are obtained. The results could be useful, not only for giving a clearer understanding of the sensor’s behavior, but also as a guideline for its design and optimization.