Theory and FEM simulation study of the double-clamped resonant beam with slit-structure

In this paper, we established the vibration model of double-clamped resonant beam with slit structure, and we theoretically analyzed the effect of rectangular slits with round corners on vibration amplitude and natural frequency of the resonant beam. The effect of rectangular slits on detection sensitivity of resonant beam is also analyzed. According to the theoretical analysis, computational studies of slit size and location influence on vibration amplitude, natural frequency and detection sensitivity of the resonant beam were carried out. Meanwhile, stress concentration of proposed slit structure with rounded corners was calculated by finite element method (FEM) and was compared with the stress concentration of slit with right corners. Finally, for resonant beams with slits of different size and location, theoretical calculation results and the FEM simulation results of natural frequency were compared. Theoretical analysis and FEM simulation are in good agreement.