@inproceedings{c16da7d58a074d3eafc738c81905ef2e,
title = "Tension-Induced MOEMS Graphene Resonant Pressure Sensor",
abstract = "Graphene micro-resonators could be utilized for high-sensitivity pressure sensing. In this paper, a tension-induced micro-opto-electro-mechanical systems (MOEMS) graphene resonant pressure sensor was first reported to our knowledge. The fabrication process involved the use of anodic bonding and fiber optic sensing technology to construct a hermetically sealed vacuum cavity, which allowed the graphene resonant sensor to operate at pressures exceeding one atmosphere with full-scale stably high quality factors. Pressure test in the range of 0-100 kPa revealed a pressure sensitivity of 2 Hz/Pa, as well as a minimal temperature drift of only 0.014\%/ in the range of 0-50 {\'c} , which is merely 0.45\% of the electrical counterpart. This novel structural design offers a promising avenue for developing pressure sensors using two-dimensional (2D) material resonators.",
keywords = "Graphene, MOEMS, resonant sensor, vacuum sealing",
author = "Yujian Liu and Cheng Li and Zhengwei Wu and Shangchun Fan and Zhen Wan and Song Han",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "英语",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1774--1777",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "美国",
}