Study on one-dimension well-aligned ZnO whiskers and doping by MOCVD

Zinc oxide whisker arrays well-aligned along [0001] direction were grown on the substrates of glass and single crystal silicon by atmospheric metal organic chemical vapor deposition method (MOCVD). Multi-gas pipelines were used to transport different metal organic compounds to prepare Al doped ZnO whiskers. XRD results indicate that undoped ZnO whiskers have a wurtzite-type crystalline structure, and grow strongly along the ZnO [0001] direction. Al-doped ZnO whiskers also have a crystalline structure of wurtzite-type, but grow slightly weak along the ZnO [0001]. The SEM observation shows that undoped ZnO whiskers have a regular arrangement and an aspect ratio of about 20. The morphology of doped ZnO whiskers became more and more anomalous with the increase of Al content.