Study on micro-mirror macro model and its dynamic behavior

Research on modeling electrostatic micro actuator is essential for the effective control of its action. In this paper, a kind of modeling way is presented for conventional tilting reflecting micro mirror. A polynomial algebraic equation for angel of a tilting 2 orders torque system is introduced and the characters of the model are estimated precisely. Simulation and experiment are implemented for proving the method. Finally, PID control algorithm is exerted hence based on the model and the dynamic response feature is promoted.