Study on electrical and optical properties of flexible transparent conductive ITO film

Yi Sun; Xungang Diao; Meng Yang; Zhe Wu; Yuanjie Shu

Study on electrical and optical properties of flexible transparent conductive ITO film

Yi Sun^*
, Xungang Diao
, Meng Yang
, Zhe Wu
, Yuanjie Shu

^*此作品的通讯作者

Beihang University
China Academy of Engineering Physics

科研成果: 期刊稿件 › 文章 › 同行评审

3 引用（Scopus）

摘要

Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6%, respectively.

源语言	英语
页（从-至）	86-90
页数	5
期刊	Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
卷	36
期	1
出版状态	已出版 - 1月 2007

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abstract = "Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6\%, respectively.",

keywords = "DC magnetron sputtering, Flexible substrate, ITO transparent conductive thin film",

author = "Yi Sun and Xungang Diao and Meng Yang and Zhe Wu and Yuanjie Shu",

year = "2007",

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language = "英语",

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T1 - Study on electrical and optical properties of flexible transparent conductive ITO film

AU - Sun, Yi

AU - Diao, Xungang

AU - Yang, Meng

AU - Wu, Zhe

AU - Shu, Yuanjie

PY - 2007/1

Y1 - 2007/1

N2 - Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6%, respectively.

AB - Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 Ω/□ and 85.6%, respectively.

KW - DC magnetron sputtering

KW - Flexible substrate

KW - ITO transparent conductive thin film

UR - https://www.scopus.com/pages/publications/34147160364

M3 - 文章

AN - SCOPUS:34147160364

SN - 1002-185X

VL - 36

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JO - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

JF - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

IS - 1

ER -

Study on electrical and optical properties of flexible transparent conductive ITO film

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