Study of multiple-sensor three dimensional motion coordinate measurement technology

An integrated multiple-sensor three-dimension coordinate measurement system was proposed, which was composed of a laser probe, a micro-vision probe, a contact probe and a three coordinate measurement machine. Pixel-level merge technique of vision probe and laser probe was designed to form 3-D surface point-cloud of workpiece, followed with date process such as image registration based on phase correlation and date segment by used of merge of edge and region and line-based surface identify, geometry parameters of measured-feature were gained finally. Then self-calibration of whole system and micro-vision system was proposed. At last, an optical instrument demanding high-precise dimension was measured by the system, which demonstrated that the uncertainty of the measurement system was 1.2 μm.