Structure design of quartz vibrating beam accelerometer resonator

Design of quartz resonator is the key to realize the high-precision quartz vibrating beam accelerometer. First, the optimal cut type and cut angle of (xyt)5° was determined by theoretical analyses. Next, based on the relationships between the structural parameters of quartz resonator and the sensitivity of quartz vibrating beam accelerometer obtained by the theoretical analyses, the structure parameters of quartz resonator were optimized and verified by finite element analysis. Finally, the vibration modes of quartz resonator were simulated, and the simulation models were employed to study the influences of the fabrication deviations on the sensitivity of the accelerometer. Results of finite element analysis show that the quartz resonator is predicted to vibrate in an ideal mode and enables the accelerometer's scale factor be at 40 Hz/g. These results show that the optimized quartz resonator could be used in high-precision quartz vibrating beam accelerometer.