TY - GEN
T1 - Structure design of out-plane evanescent coupling accelerometer with sub-wavelength gratings
AU - Yao, Baoyin
AU - Feng, Lishuang
AU - Zhou, Zhen
AU - Wang, Wenpu
AU - Wang, Xiao
AU - Liu, Weifang
PY - 2013
Y1 - 2013
N2 - It is the key for MOEMS accelerometer to combine large mass, weak spring and sub-wavelength gratings in order to achieve high precision. A novel out-plane MOEMS accelerometer based on near-field evanescent waves coupling by means of variable period sub-wavelength gratings has been proposed. Structure parameters were optimized by finite element analysis to achieve high sensitivity in an ideal vibration mode. Based on the ANSYS simulation, the novel accelerometer is predicted to work in the first modal with displacement sensitivity at 2023 nm/G and measurement range of 0.3G, corresponding to 1st diffraction beam optical sensitivity 0.46%/mG. These results provide a theoretical basis for design and fabrication of out-plane MOEMS accelerometer with sub-wavelength gratings.
AB - It is the key for MOEMS accelerometer to combine large mass, weak spring and sub-wavelength gratings in order to achieve high precision. A novel out-plane MOEMS accelerometer based on near-field evanescent waves coupling by means of variable period sub-wavelength gratings has been proposed. Structure parameters were optimized by finite element analysis to achieve high sensitivity in an ideal vibration mode. Based on the ANSYS simulation, the novel accelerometer is predicted to work in the first modal with displacement sensitivity at 2023 nm/G and measurement range of 0.3G, corresponding to 1st diffraction beam optical sensitivity 0.46%/mG. These results provide a theoretical basis for design and fabrication of out-plane MOEMS accelerometer with sub-wavelength gratings.
KW - Evnescent waves coupling
KW - Finite element analysis
KW - Optical MEMS accelerometer
KW - Sub-wavelength gratings
UR - https://www.scopus.com/pages/publications/84896801310
U2 - 10.1109/3M-NANO.2013.6737433
DO - 10.1109/3M-NANO.2013.6737433
M3 - 会议稿件
AN - SCOPUS:84896801310
SN - 9781479912131
T3 - 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings
SP - 287
EP - 290
BT - 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings
PB - IEEE Computer Society
T2 - 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013
Y2 - 26 August 2013 through 30 August 2013
ER -