TY - GEN
T1 - Structure and tribological properties of ultra-thin tetrahedral amorphous carbon (ta-C) films
AU - Lu, Xinchun
AU - Wang, Hui
AU - Zhang, Chenhui
AU - Luo, Jianbin
PY - 2006
Y1 - 2006
N2 - Ultra-thin tetrahedral amorphous carbon (ta-C) films were deposited by the filtered cathodic vacuum arc (FCVA) technique. The thickness, structure, and topography of the films were studied by various analysis methods, such as auger electron spectroscopy (AES) depth profile, high resolution transmission electron microscope (HRTEM), Raman spectroscopy, and atomic force microscopy (AFM). A tribometer was used to investigate the tribological properties of the ta-C films. The results indicate that ta-C film with thickness less than 2 nm can be obtained by the FCVA technique. As the film thickness increases the relative intensity ratio ID/IG decreases, which means that sp3 bond in the films increases. The oxide layer cleaning procedure of silicon substrate before deposition influences the growth mode and surface roughness of the films. The ultra-thin ta-C film has the lowest friction coefficient of 0.19 and excellent anti-wear properties.
AB - Ultra-thin tetrahedral amorphous carbon (ta-C) films were deposited by the filtered cathodic vacuum arc (FCVA) technique. The thickness, structure, and topography of the films were studied by various analysis methods, such as auger electron spectroscopy (AES) depth profile, high resolution transmission electron microscope (HRTEM), Raman spectroscopy, and atomic force microscopy (AFM). A tribometer was used to investigate the tribological properties of the ta-C films. The results indicate that ta-C film with thickness less than 2 nm can be obtained by the FCVA technique. As the film thickness increases the relative intensity ratio ID/IG decreases, which means that sp3 bond in the films increases. The oxide layer cleaning procedure of silicon substrate before deposition influences the growth mode and surface roughness of the films. The ultra-thin ta-C film has the lowest friction coefficient of 0.19 and excellent anti-wear properties.
KW - FCVA
KW - Surface morphology
KW - Ultra-thin ta-C film
UR - https://www.scopus.com/pages/publications/85196553437
U2 - 10.1115/IMECE2006-14412
DO - 10.1115/IMECE2006-14412
M3 - 会议稿件
AN - SCOPUS:85196553437
SN - 0791837904
SN - 9780791837900
T3 - American Society of Mechanical Engineers, Tribology Division, TRIB
BT - Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Tribology
PB - American Society of Mechanical Engineers (ASME)
T2 - 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006
Y2 - 5 November 2006 through 10 November 2006
ER -