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Self-consistent field theory of directed self-assembly on chemically- prepatterned surfaces

  • Kenichi Izumi
  • , Nabil Laachi
  • , Xingkun Man
  • , Kris T. Delaney
  • , Glenn H. Fredrickson
  • University of California at Santa Barbara
  • JSR Corporation

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

We use self-consistent field theory to investigate the self-assembly of AB diblock copolymers on chemically patterned substrates. The striped substrates consist of attractive domains alternating with neutral ones. Using our simulations, we observe the formation of different self-assembled morphologies in the polymer film and compute their formation free energy for various pattern widths and wetting conditions. We found that perpendicular lamellae are best formed when the A-attractive stripes have a width near half the natural lamellar period in bulk, but lamellar structures with wide bases are also formed in wide stripes. We also computed the formation energy of isolated dislocations and found that the energy cost is ≈ 50-110kT for ±15nm deviations from optimal commensurability conditions.

源语言英语
主期刊名Alternative Lithographic Technologies VI
出版商SPIE
ISBN(印刷版)9780819499721
DOI
出版状态已出版 - 2014
已对外发布
活动Alternative Lithographic Technologies VI - San Jose, CA, 美国
期限: 24 2月 201427 2月 2014

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
9049
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议Alternative Lithographic Technologies VI
国家/地区美国
San Jose, CA
时期24/02/1427/02/14

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