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Selective sensing of chemical vapors using phase spectra detection on CVD graphene fet

  • Huiliang Liu
  • , Yao Chu
  • , Yumeng Liu
  • , Takeshi Hayasaka
  • , Nirav Joshi
  • , Yong Cui
  • , Xiaohao Wang
  • , Zheng You
  • , Liwei Lin*
  • *此作品的通讯作者
  • Tsinghua University
  • University of California at Berkeley

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

This work marks the first use of phase spectra detection method to realize selective sensing of chemical vapors on a chemical vapor deposition (CVD) monolayer graphene field effect transistor (FET). Compared with the state-of-art technology, three distinctive advances have achieved: (1) first demonstration of selective gas sensing using the phase spectra detection method on a single CVD graphene FET without surface functionalization; (2) first demonstration of quantitative phase spectra detection results for four gas vapors (water, methanol, ethanol and isopropanol) with different concentrations; and (3) illustrations of the sensing selectivity by the extraction of phase spectra features with experimental validations by using the principal component analysis (PCA) scheme. As such, the proposed method of phase spectra detection can achieve gas sensing selectivity without surface functionalization or an array of devices.

源语言英语
主期刊名2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
出版商Institute of Electrical and Electronics Engineers Inc.
210-213
页数4
ISBN(电子版)9781538647820
DOI
出版状态已出版 - 24 4月 2018
已对外发布
活动31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, 英国
期限: 21 1月 201825 1月 2018

出版系列

姓名Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2018-January
ISSN(印刷版)1084-6999

会议

会议31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
国家/地区英国
Belfast
时期21/01/1825/01/18

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