TY - GEN
T1 - Selective sensing of chemical vapors using phase spectra detection on CVD graphene fet
AU - Liu, Huiliang
AU - Chu, Yao
AU - Liu, Yumeng
AU - Hayasaka, Takeshi
AU - Joshi, Nirav
AU - Cui, Yong
AU - Wang, Xiaohao
AU - You, Zheng
AU - Lin, Liwei
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - This work marks the first use of phase spectra detection method to realize selective sensing of chemical vapors on a chemical vapor deposition (CVD) monolayer graphene field effect transistor (FET). Compared with the state-of-art technology, three distinctive advances have achieved: (1) first demonstration of selective gas sensing using the phase spectra detection method on a single CVD graphene FET without surface functionalization; (2) first demonstration of quantitative phase spectra detection results for four gas vapors (water, methanol, ethanol and isopropanol) with different concentrations; and (3) illustrations of the sensing selectivity by the extraction of phase spectra features with experimental validations by using the principal component analysis (PCA) scheme. As such, the proposed method of phase spectra detection can achieve gas sensing selectivity without surface functionalization or an array of devices.
AB - This work marks the first use of phase spectra detection method to realize selective sensing of chemical vapors on a chemical vapor deposition (CVD) monolayer graphene field effect transistor (FET). Compared with the state-of-art technology, three distinctive advances have achieved: (1) first demonstration of selective gas sensing using the phase spectra detection method on a single CVD graphene FET without surface functionalization; (2) first demonstration of quantitative phase spectra detection results for four gas vapors (water, methanol, ethanol and isopropanol) with different concentrations; and (3) illustrations of the sensing selectivity by the extraction of phase spectra features with experimental validations by using the principal component analysis (PCA) scheme. As such, the proposed method of phase spectra detection can achieve gas sensing selectivity without surface functionalization or an array of devices.
UR - https://www.scopus.com/pages/publications/85047001658
U2 - 10.1109/MEMSYS.2018.8346521
DO - 10.1109/MEMSYS.2018.8346521
M3 - 会议稿件
AN - SCOPUS:85047001658
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 210
EP - 213
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -