TY - JOUR
T1 - Scanning near-field acoustic microscope and its application
AU - Xu, Ping
AU - Cai, Wei
AU - Wang, Rongming
PY - 2011/1
Y1 - 2011/1
N2 - Scanning near-field acoustic microscope (SNAM) combines the ultrasonic detection technology with scanning near-field microscopy. The main characteristic of such microscope is that the acoustic wave is produced or detected in near-field area whether ultrasonic transducer acts as generator or detector. The resolution of SNAM can reach to nanometer scale. First, two typical SNAMs, scanning electron acoustic microscope and scanning probe acoustic microscope, will be introduced in this paper. The working principle of our homemade SNAM based on a commercial scanning probe microscope will be reported, together with some recent results from this homemade SNAM.
AB - Scanning near-field acoustic microscope (SNAM) combines the ultrasonic detection technology with scanning near-field microscopy. The main characteristic of such microscope is that the acoustic wave is produced or detected in near-field area whether ultrasonic transducer acts as generator or detector. The resolution of SNAM can reach to nanometer scale. First, two typical SNAMs, scanning electron acoustic microscope and scanning probe acoustic microscope, will be introduced in this paper. The working principle of our homemade SNAM based on a commercial scanning probe microscope will be reported, together with some recent results from this homemade SNAM.
KW - scanning near-field acoustic microscope
KW - scanning probe microscopy
KW - ultrasonic detection technology
UR - https://www.scopus.com/pages/publications/78651486919
U2 - 10.1007/s11431-010-4147-5
DO - 10.1007/s11431-010-4147-5
M3 - 文章
AN - SCOPUS:78651486919
SN - 1674-7321
VL - 54
SP - 126
EP - 130
JO - Science China Technological Sciences
JF - Science China Technological Sciences
IS - 1
ER -