Review of atomic MEMS: Driving technologies and challenges

Haifeng Dong; Jiancheng Fang; Binquan Zhou; Jie Qin; Shuangai Wan

doi:10.1007/s00542-010-1089-6

Review of atomic MEMS: Driving technologies and challenges

Haifeng Dong^*
, Jiancheng Fang
, Binquan Zhou
, Jie Qin
, Shuangai Wan

^*此作品的通讯作者

仪器科学与光电工程学院

Beihang University

科研成果: 期刊稿件 › 文献综述 › 同行评审

18 引用（Scopus）

摘要

Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

源语言	英语
页（从-至）	1683-1689
页数	7
期刊	Microsystem Technologies
卷	16
期	10
DOI	https://doi.org/10.1007/s00542-010-1089-6
出版状态	已出版 - 10月 2010

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title = "Review of atomic MEMS: Driving technologies and challenges",

abstract = "Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.",

author = "Haifeng Dong and Jiancheng Fang and Binquan Zhou and Jie Qin and Shuangai Wan",

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AU - Dong, Haifeng

AU - Fang, Jiancheng

AU - Zhou, Binquan

AU - Qin, Jie

AU - Wan, Shuangai

PY - 2010/10

Y1 - 2010/10

N2 - Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

AB - Atomic MEMS technology is an emerging multidisciplinary subject which benefits from different fields, including microfabrication, laser technique and atomic physics, etc. This paper gives an overview of atomic MEMS and discusses the challenges faced in the design and manufacture of atomic MEMS devices.

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U2 - 10.1007/s00542-010-1089-6

DO - 10.1007/s00542-010-1089-6

M3 - 文献综述

AN - SCOPUS:78149407066

SN - 0946-7076

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SP - 1683

EP - 1689

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 10

ER -

Review of atomic MEMS: Driving technologies and challenges

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