TY - GEN
T1 - Research on influence of temperature effect on silicon-on-sapphire pressure sensor by finite element method
AU - Li, Yaping
AU - Guo, Zhanshe
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/11
Y1 - 2019/11
N2 - This paper systemically introduced the effect of temperature on the measuring precision for silicon-on-sapphire pressure sensor using the inner stress distribution change as the main thread of analyzing method. Firstly, using the so called Fourier's 1st law and first law of thermodynamics, the temperature distribution of sapphire diaphragm is analyzed under the function of heat conduction and heat convection in which the temperature load is applied on the titanium alloy. Then, using the 4MPa as the pressure load, the stress distribution of under the function of pressure and the function of pressure and temperature are also analyzed. It is concluded that when the applied temperature is room temperature, temperature will initiate little effect to the inner stress. Their relative error is just 1.49%. When the analyzed temperature is 200°C, the relative error is 22%, which means the temperature has great effect to the measuring precision of the sensor.
AB - This paper systemically introduced the effect of temperature on the measuring precision for silicon-on-sapphire pressure sensor using the inner stress distribution change as the main thread of analyzing method. Firstly, using the so called Fourier's 1st law and first law of thermodynamics, the temperature distribution of sapphire diaphragm is analyzed under the function of heat conduction and heat convection in which the temperature load is applied on the titanium alloy. Then, using the 4MPa as the pressure load, the stress distribution of under the function of pressure and the function of pressure and temperature are also analyzed. It is concluded that when the applied temperature is room temperature, temperature will initiate little effect to the inner stress. Their relative error is just 1.49%. When the analyzed temperature is 200°C, the relative error is 22%, which means the temperature has great effect to the measuring precision of the sensor.
KW - Component
KW - Finite Element Method
KW - Measuring precision
KW - Silicon-on-sapphire pressure sensor
KW - Temperature effect
UR - https://www.scopus.com/pages/publications/85081181142
U2 - 10.1109/EEI48997.2019.00010
DO - 10.1109/EEI48997.2019.00010
M3 - 会议稿件
AN - SCOPUS:85081181142
T3 - Proceedings - 2019 International Conference on Electronic Engineering and Informatics, EEI 2019
SP - 14
EP - 17
BT - Proceedings - 2019 International Conference on Electronic Engineering and Informatics, EEI 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 International Conference on Electronic Engineering and Informatics, EEI 2019
Y2 - 8 November 2019 through 10 November 2019
ER -