Research development of pressure sensors for extreme environments- a review

With the expansion of aerospace, energy exploration, and industrial manufacturing into extreme environments, the development of pressure sensors capable of withstanding harsh conditions such as high temperatures, high pressures, strong corrosion, and intense radiation has become critically important. Against this backdrop, the paper first systematically reviews recent advances in key technologies for pressure sensors designed for extreme environments, including the effects of high temperatures on material lattice stability, chemical oxidation risks, and thermal stress mismatch in packaging systems. It also analyzes the influence of high-pressure or wide-range pressure measurement environments on sensing structure design and material properties. Furthermore, it discusses the impact of high-frequency and dynamic pressure measurement environments on sensor performance. In addition, the research progress on temperature compensation strategies for sensors is reviewed. Subsequently, the study introduces advancements in various types of pressure sensors for extreme environments, including piezoelectric, piezoresistive, capacitive, optical, and resonant pressure sensors. Finally, the current development status of pressure sensors for extreme environments is summarized, and future directions are discussed in terms of multiparameter integration, intelligent compensation, fabrication compatibility, radiation-tolerant material platforms, and long-term reliability.