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Positive velocity feedback control of flexure-based actuator for vibration suppression

  • Zhikun Cao
  • , Chi Zhang*
  • , Qiang Liu
  • , Hongyuan Lian
  • , Guilin Yang
  • , Si Lu Chen
  • *此作品的通讯作者
  • CAS - Ningbo Institute of Material Technology and Engineering
  • University of Chinese Academy of Sciences

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Nanopositioning Stages based on flexure supporting mechanism are commonly used in precision manufacturing system with the advantages of non-friction and high accuracy. But there is always a major challenge to restrain the vibrations result from flexible supporting structure. This paper presents a novel control strategy based on positive velocity feedback (PVF) designed for flexure-based actuator, which is driven by voice coil motor. A PVF controller is designed to reduce resonance peak by using the similar ideal with positive position feedback[1]. Meanwhile, more advantages can be obtained with the employment of proportional-integral (PI) controller in position loop. The experiment results validate that the PVF control strategy presented in this paper can restrain vibration in nanopositioning stages effectively, and reduce resonance peak in velocity loop by 2dB, and increase the bandwidth by more than 40Hz.

源语言英语
主期刊名2017 IEEE International Conference on Cybernetics and Intelligent Systems, CIS 2017 and IEEE Conference on Robotics, Automation and Mechatronics, RAM 2017 - Proceedings
出版商Institute of Electrical and Electronics Engineers Inc.
365-369
页数5
ISBN(电子版)9781538631355
DOI
出版状态已出版 - 2 7月 2017
已对外发布
活动8th IEEE International Conference on Cybernetics and Intelligent Systems, CIS 2017 and IEEE Conference on Robotics, Automation and Mechatronics, RAM 2017 - Ningbo, 中国
期限: 19 11月 201721 11月 2017

出版系列

姓名2017 IEEE International Conference on Cybernetics and Intelligent Systems, CIS 2017 and IEEE Conference on Robotics, Automation and Mechatronics, RAM 2017 - Proceedings
2018-January

会议

会议8th IEEE International Conference on Cybernetics and Intelligent Systems, CIS 2017 and IEEE Conference on Robotics, Automation and Mechatronics, RAM 2017
国家/地区中国
Ningbo
时期19/11/1721/11/17

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