PMN-PT relaxor ferroelectric single crystal flexible piezoelectric energy harvester

Chemical-based solid-state batteries are widely used as energy supply units in micro-electro-mechanical systems (MEMS). However, their drawbacks, including environmental pollution and frequent replacement requirements, limit their practical application. In contrast, mechanical energy available in the natural environment can be harvested and converted into electricity using piezoelectric materials, offering a promising alternative for powering electronic devices. In this paper, based on the fundamental principles of piezoelectric power generation and kinematic principle of chemical mechanical polishing (CMP), an electromechanical conversion model for flexible piezoelectric energy harvesters was established. And then the lead-based composite perovskite relaxor ferroelectric single crystal, lead magnesium niobate-lead titanate (PMN-PT), was used as the piezoelectric unit. The optimized geometric dimensions of the flexible energy harvester were determined through simulation analysis. Subsequently, the flexible preparation process was developed using chemical mechanical polishing (CMP) technology. Based on these optimizations, the flexible interdigital energy harvester was fabricated, and the corresponding test system was constructed. Furthermore, the output performance of the flexible piezoelectric energy harvester was investigated. The test results indicate that the forward connection yields an output voltage of 13.5 V and an output current of 10.2 μA, while the reverse connection produces an output voltage of 13.8 V and an output current of 10.6 μA. These results demonstrate the viability of powering self-powered sensor systems and wearable electronics.