Parametric design and experiment research on a valveless micropump

This paper described a piezoelectric valveless micropump developed to be the key devices of microfluids, the prototype of the micropump had been designed and manufactured. The vibration modes and the best work frequency were obtained by means of Finite Element Method. According the experimental results, the characteristic relations about excitation voltage and actuation frequency to the flux of micropump were verified. The experimental results demonstrated that the micropump was suitable for microfluids manipulation with many advantages, such as simple structure, low price, high reliability and so on.