Ordered metal film pattern with submicron period

Zhuwei Zhang; Chuanfei Guo; Sihai Cao; Lifeng Bai; Yong Xie; Qian Liu

doi:10.1143/JJAP.48.090208

Ordered metal film pattern with submicron period

Zhuwei Zhang^*
, Chuanfei Guo
, Sihai Cao
, Lifeng Bai
, Yong Xie
, Qian Liu

^*此作品的通讯作者

物理学院

National Center for Nanoscience and Technology
University of Chinese Academy of Sciences
Northwest Institute for Nonferrous Metal Research

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

The wavelength of a metallic wrinkle has been decreased to 500nm using a polymer/metal bilayer system. The good agreement of experimental results with an existing theory indicates that a continuous mechanical model is still appropriate for polymer/metal bilayer wrinkling even when a metal film is ultrathin at 5 nm thickness. The order of the submicron structure can be effectively controlled by prefabricating structures on polymer underlays. A large-area, cost-effective method of fabricating the submicron structure is provided and shows potential in nanostructure fabrication.

源语言	英语
页（从-至）	902081-902083
页数	3
期刊	Japanese Journal of Applied Physics
卷	48
期	9 Part 1
DOI	https://doi.org/10.1143/JJAP.48.090208
出版状态	已出版 - 2009

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AU - Zhang, Zhuwei

AU - Guo, Chuanfei

AU - Cao, Sihai

AU - Bai, Lifeng

AU - Xie, Yong

AU - Liu, Qian

PY - 2009

Y1 - 2009

N2 - The wavelength of a metallic wrinkle has been decreased to 500nm using a polymer/metal bilayer system. The good agreement of experimental results with an existing theory indicates that a continuous mechanical model is still appropriate for polymer/metal bilayer wrinkling even when a metal film is ultrathin at 5 nm thickness. The order of the submicron structure can be effectively controlled by prefabricating structures on polymer underlays. A large-area, cost-effective method of fabricating the submicron structure is provided and shows potential in nanostructure fabrication.

AB - The wavelength of a metallic wrinkle has been decreased to 500nm using a polymer/metal bilayer system. The good agreement of experimental results with an existing theory indicates that a continuous mechanical model is still appropriate for polymer/metal bilayer wrinkling even when a metal film is ultrathin at 5 nm thickness. The order of the submicron structure can be effectively controlled by prefabricating structures on polymer underlays. A large-area, cost-effective method of fabricating the submicron structure is provided and shows potential in nanostructure fabrication.

UR - https://www.scopus.com/pages/publications/77952692838

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DO - 10.1143/JJAP.48.090208

M3 - 文章

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SP - 902081

EP - 902083

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 9 Part 1

ER -

Ordered metal film pattern with submicron period

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