Optimization of sensitivity for a novelly-designed MEMS resonant gyroscope

This paper introduces a novel micro-electromechanical systems (MEMS) vibratory rate gyroscope based on resonant sensing of the Coriolis force. Its advantages include a quasi-digital FM (frequency modulation) output, high sensitivity, and flexible parameter design. As a whole, this structure is consisted of proof masses, frame suspensions, two-stage amplifying leverage mechanisms, double-ended tuning fork (DETF), driving and checking combs. The simulation results show that, while other performances do not change a lot, the sensitivity of the initial structure, the improved structure 1, the improved structure 2 and the final structure are 0.080, 0.210, 0.341 and 0.5447 Hz/(°/s) respectively. The sensitivity increased a lot after each improvement. Moreover, for the final structure, the amplitude of DETF is 1.16×10^-4 times as big as that of the external mass in the driven direction. And the maximum relative deviation is 6.41×10^-7 on the measurement range (±300 °/s).