Optical metrology embraces deep learning: keeping an open mind

Bing Pan

doi:10.1038/s41377-022-00829-1

Optical metrology embraces deep learning: keeping an open mind

Bing Pan^*

^*此作品的通讯作者

航空科学与工程学院

科研成果: 期刊稿件 › 文章 › 同行评审

5 引用（Scopus）

摘要

Optical metrology practitioners ought to embrace deep learning with an open mind, while devote continuing efforts to look for its theoretical groundwork and maintain an awareness of its limits.

源语言	英语
文章编号	139
期刊	Light: Science and Applications
卷	11
期	1
DOI	https://doi.org/10.1038/s41377-022-00829-1
出版状态	已出版 - 12月 2022

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10.1038/s41377-022-00829-1

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@article{e942805311d6474bbc60e2172f996e64,

title = "Optical metrology embraces deep learning: keeping an open mind",

abstract = "Optical metrology practitioners ought to embrace deep learning with an open mind, while devote continuing efforts to look for its theoretical groundwork and maintain an awareness of its limits.",

author = "Bing Pan",

note = "Publisher Copyright: {\textcopyright} 2022, The Author(s).",

year = "2022",

month = dec,

doi = "10.1038/s41377-022-00829-1",

language = "英语",

volume = "11",

journal = "Light: Science and Applications",

issn = "2047-7538",

publisher = "Springer Nature",

number = "1",

}

TY - JOUR

T1 - Optical metrology embraces deep learning

T2 - keeping an open mind

AU - Pan, Bing

PY - 2022/12

Y1 - 2022/12

N2 - Optical metrology practitioners ought to embrace deep learning with an open mind, while devote continuing efforts to look for its theoretical groundwork and maintain an awareness of its limits.

AB - Optical metrology practitioners ought to embrace deep learning with an open mind, while devote continuing efforts to look for its theoretical groundwork and maintain an awareness of its limits.

UR - https://www.scopus.com/pages/publications/85130226098

U2 - 10.1038/s41377-022-00829-1

DO - 10.1038/s41377-022-00829-1

M3 - 文章

AN - SCOPUS:85130226098

SN - 2047-7538

VL - 11

JO - Light: Science and Applications

JF - Light: Science and Applications

IS - 1

M1 - 139

ER -

Optical metrology embraces deep learning: keeping an open mind

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