On-chip testing method for measurements of friction and wear in moveable MEMS devices

An on-chip micro-tribotester was developed to simulate the tribology behaviors on sidewalk of single crystal silicon MEMS devices. In this system,the loading structure, frictional pair and force sensors are all integrated on a single chip by the bulk silicon process and bonding technology. Tribology testing was carried out on the micro-tribotester under a digital microscope at ambient condition. It is found that friction coefficient decreases with the increase of normal force. In addition, severe oxidation is detected out on the wear debris surface after a long time high frequent reciprocating wear testing.