On-chip integrated high-performance bi-planar coils for chip-scale atomic magnetometers

In recent years, there has been a rapid advancement in the miniaturization of atomic magnetometers, driven by the urgent need for high spatial resolution magnetoencephalography (MEG) and magnetocardiography (MCG). As key components in atomic magnetometers that achieve magnetic modulation and compensation, on-chip integration of uniform-field coils have raised wide interest. In this study, several integrated bi-planar coils (BCs) are developed to generate uniform-field for atomic magnetometers based on target field method (TFM) and artificial fish swarm algorithm (AFSA). Our design is laid out on 10 mm× 10 mm sized glass wafer and is fabricated through CMOS-compatible nano fabrication technology, The uniformity of the designed Bx and Bz uniform coils has been improved by 39.9 % and 44.3 % compared to the conventional Helmholtz coils, respectively. The magnetometer using these integrated bi-planar coils for magnetic field compensation has a sensitivity of 16.7 fT/Hz^1/2. This research lays the groundwork for the development of micro-nano integrated atomic magnetometers.