Notice of Removal: Comparison between Ir, Ir_0.85Rh_0.15 and Ir_0.7 Rh_0.3 thin films as electrodes for surface acoustic waves applications above 800 °c in air atmosphere

We previously demonstrated the potential of Ir_xRh_1-x thin films (x < 0.5) as electrodes for high-temperature surface acoustic waves (SAW) applications [1]. To remind, we observed that after a 4-days annealing period at 800°C under air atmosphere, these films oxidize to form Ir_xRh_1-xO₂ films, which exhibit a resistivity suitable for the targeted application, especially as the Ir rate is high (ρ 180 μΩ·cm for x = 0.5). Consequently, the first aim of this work is to study the most promising Ir-rich compositions (0.7 < × < 1). Moreover, as it is well know that pure Ir transforms into volatile IrO₃ in the vicinity of 800°C [2], we also investigate the interest of alloying Ir with Rh regarding this degradation effect. Finally, we examine the reliability of SAW devices based on Ir_xRh_1-x electrodes and Langasite (LGS) substrate during a 20-days annealing period between 800 and 950°C.