Monolithic PZT microstage with multi degrees of freedom for high-precision positioning

This paper presents the fabrication and characterizations of a PZT actuated monolithic microstage with multi degrees of freedom (DOFs) used for high-precision positioning. The entire device is fabricated in a symmetrically arrangement from a PZT plate with a size of 15×15×0.8 mm ³. Four actuation units with a displacement amplification mechanism are integrated in the structure. They can be driven individually which result in movements of a stage in different directions. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 μm in x- and y-axes and 10 μm in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.