摘要
With the laminar plasma materials processing as the research background, modeling study is conducted concerning the effects of argon shroud on the characteristics of the laminar argon plasma jet impinging normally upon a flat substrate located in air surroundings. It is shown that adding shrouding gas is an effective method to reduce and control the entrainment of ambient air into the laminar plasma jet. The shrouding gas flow rate or velocity, the injection slot width and the stand-off distance of the substrate appreciably affect the air contents in the plasma near the substrate surface.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 724-728 |
| 页数 | 5 |
| 期刊 | Thin Solid Films |
| 卷 | 506-507 |
| DOI | |
| 出版状态 | 已出版 - 26 5月 2006 |
| 已对外发布 | 是 |
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