Modeling of precision grinding process based on micro-positioning table and error compensation technology

In order to eliminate the influence of the wheel vibration on machining precision of the workpiece, a micropositioning workpiece table with nanometer resolution is utilized to implement dynamic compensation. In order to study the characteristics of the grinding machine modulate with micropositioning table, the modal synthesis method and Lagrange's equation are utilized to establish the dynamic equation of the intelligent grinding machine system. According to the fact, the whole system is divided into three subsystems connected by two constrain matrixes. Using the state-space method, the numerical solution is obtained. Then the response of the system can be achieved using the principle of modal superposition. Accordingly, the dynamic characteristics of the system and machining precision before and after compensation are analyzed. The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micro-positioning workpiece table to implement dynamic compensation.