Modeling of MEMS reflecting mirror and its control experimental research

According to the transition function of the classic model of two-order oscillating system, a kind of micro electronic mechanic system (MEMS) reflecting mirror characteristic estimation method based on experiments was presented the equilibrium state between the electrostatic and elastic torque being considered. The relationship between the experiment curve and the damping coefficient was deduced. Because of the identification of the coefficient without the micro mirror's dimension and air pressure in the relationship, a great deal of computation would be simplified with sufficient accuracy. The validity of the parameters identification was verified experimentally. The overshot of the system was reduced clearly and the time of stability was limited within less than 7 ms. It is concluded that the estimation method is effective.