@inproceedings{4063c405b78b430ca429ae1ceaa41252,
title = "Modeling and active disturbance rejection control for a piezoelectric-actuator driven nanopositioner",
abstract = "This paper investigates the modeling and control problem of a novel piezoelectric-actuator (PZT) driven nanopositioner. The physical model of the nanopositioning stage is first discussed with the hysteresis nonlinearity of the PZT actuator. For the purposes of eliminating the hysteresis impact and various disturbances, an active disturbance rejection control (ADRC) algorithm is proposed, where the nonlinear dynamics of the model and external disturbances are treated as 'total disturbances' which can be estimated by an extended state observer (ESO) and then compensated by a state feedback control law. The proposed algorithm is deployed in real time implementations on a nanopositioning servo platform and demonstrates good control performance in terms of high precision positioning and hysteresis elimination.",
keywords = "active disturbance rejection control (ADRC), extended state observer (ESO), piezoelectric-actuator driven nanopositioning stage",
author = "Tongtong Leng and Pengbo Liu and Peng Yan and Zhen Zhang and Lei Guo",
note = "Publisher Copyright: {\textcopyright} 2014 TCCT, CAA.; Proceedings of the 33rd Chinese Control Conference, CCC 2014 ; Conference date: 28-07-2014 Through 30-07-2014",
year = "2014",
month = sep,
day = "11",
doi = "10.1109/ChiCC.2014.6895952",
language = "英语",
series = "Proceedings of the 33rd Chinese Control Conference, CCC 2014",
publisher = "IEEE Computer Society",
pages = "5910--5915",
editor = "Shengyuan Xu and Qianchuan Zhao",
booktitle = "Proceedings of the 33rd Chinese Control Conference, CCC 2014",
address = "美国",
}