TY - GEN
T1 - Micromanipulation method and design of tool based on vibration
AU - Chen, Tao
AU - Wang, Yaqiong
AU - Yang, Zhan
AU - Wang, Pengbo
AU - Liu, Huicong
AU - Liu, Jinyou
AU - Meng, Di
AU - Zhang, Xiang
AU - Sun, Lining
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/9/22
Y1 - 2016/9/22
N2 - This paper proposed an effective release method of micro objects by adhesion control based on the piezoelectric vibration. A micromanipulation system was presented to carry out dynamic manipulation. The operation strategy employing inertia force to overcome adhesion force was established by modeling and theoretical analysis. Experimental results with this release method achieved 90% repeatability with releasing accuracy of 4± 0.5μm, which was experimentally quantified through the manipulation of 20-80μm polystyrene spheres under an optical microscope. A novel triple-fingers gripper device was designed to achieve a perfect release effect. Tungsten tipped probes as the finger of end effectors were used to pick and place the micro objects. The probes were mounted on three cantilevers driven by piezoelectric ceramic transducers (PZT). 200 spheres had been picked up and placed on the platform. The experiment results shown that, with the help of releasing probe, the spheres of 20μm size could be released in 1s per time.
AB - This paper proposed an effective release method of micro objects by adhesion control based on the piezoelectric vibration. A micromanipulation system was presented to carry out dynamic manipulation. The operation strategy employing inertia force to overcome adhesion force was established by modeling and theoretical analysis. Experimental results with this release method achieved 90% repeatability with releasing accuracy of 4± 0.5μm, which was experimentally quantified through the manipulation of 20-80μm polystyrene spheres under an optical microscope. A novel triple-fingers gripper device was designed to achieve a perfect release effect. Tungsten tipped probes as the finger of end effectors were used to pick and place the micro objects. The probes were mounted on three cantilevers driven by piezoelectric ceramic transducers (PZT). 200 spheres had been picked up and placed on the platform. The experiment results shown that, with the help of releasing probe, the spheres of 20μm size could be released in 1s per time.
KW - Microelectromechanical systems (MEMS)
KW - micromanipulation
KW - piezoelectric vibration
UR - https://www.scopus.com/pages/publications/84991607852
U2 - 10.1109/CYBER.2016.7574821
DO - 10.1109/CYBER.2016.7574821
M3 - 会议稿件
AN - SCOPUS:84991607852
T3 - 6th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, IEEE-CYBER 2016
SP - 194
EP - 198
BT - 6th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, IEEE-CYBER 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 6th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, IEEE-CYBER 2016
Y2 - 19 June 2016 through 22 June 2016
ER -