@inproceedings{b8ae0877a08c4262b9284b5fef48c430,
title = "Micro-bridge Testing of Silicon Oxide Material",
abstract = "The present work put forward a micro-bridge testing for silicon oxide thin film. The principle of the micro-bridge testing method was introduced briefly, which is used to characterize mechanical properties of thin film. The micro bridge sample are prepared by the micromechanical fabrication technique, its process was presented in the paper. The present work shows that the Young's modulus, residuals stress for the heated oxide-Si02 are 53±15GPa, -0.15±20\%GPa, respectively.",
keywords = "Mechanical performance, Residual Stress, SiO, Young's Modulus",
author = "Zhang Haixia and Wang Yu and Zhang Taihua and Lu Deren",
year = "2003",
language = "英语",
series = "Proceedings of the International Symposium on Test and Measurement",
pages = "21--24",
booktitle = "Proceedings of the International Symposium on Test and Measurement",
}