MEMS rectangular waveguide filter at 140 GHz

Xing Hai Zhao; Guang Cun Shan; Ying Bin Zheng; Yi Jia Du; Ying Hui Chen; Jing Fu Bao; Wei Su

doi:10.3724/SP.J.1010.2013.00165

MEMS rectangular waveguide filter at 140 GHz

Xing Hai Zhao^*
, Guang Cun Shan
, Ying Bin Zheng
, Yi Jia Du
, Ying Hui Chen
, Jing Fu Bao
, Wei Su

^*此作品的通讯作者

China Academy of Engineering Physics
City University of Hong Kong
University of Electronic Science and Technology of China

科研成果: 期刊稿件 › 文章 › 同行评审

10 引用（Scopus）

摘要

The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.

源语言	英语
页（从-至）	165-169
页数	5
期刊	Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
卷	32
期	2
DOI	https://doi.org/10.3724/SP.J.1010.2013.00165
出版状态	已出版 - 4月 2013
已对外发布	是

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title = "MEMS rectangular waveguide filter at 140 GHz",

abstract = "The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.",

keywords = "DRIE, THz, Waveguide filter",

author = "Zhao, \{Xing Hai\} and Shan, \{Guang Cun\} and Zheng, \{Ying Bin\} and Du, \{Yi Jia\} and Chen, \{Ying Hui\} and Bao, \{Jing Fu\} and Wei Su",

year = "2013",

month = apr,

doi = "10.3724/SP.J.1010.2013.00165",

language = "英语",

volume = "32",

pages = "165--169",

journal = "Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves",

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T1 - MEMS rectangular waveguide filter at 140 GHz

AU - Zhao, Xing Hai

AU - Shan, Guang Cun

AU - Zheng, Ying Bin

AU - Du, Yi Jia

AU - Chen, Ying Hui

AU - Bao, Jing Fu

AU - Su, Wei

PY - 2013/4

Y1 - 2013/4

N2 - The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.

AB - The D-band MEMS rectangular waveguide iris filter was designed and fabricated. The effects of thicknesses of both metalized layer and iris, and their roughness on the performances of the filter were investigated. The prototypes were fabricated using DRIE method. Several techniques including deep etching, electroplating and bonding were employed for the fabrication of the filter. The MEMS waveguide iris filter with a central frequency of (140±3) GHz, insert loss 0.4-0.7dB, and isolation larger than 18dB has been accomplished for the first time. The test results were in agreement with the simulations.

KW - DRIE

KW - THz

KW - Waveguide filter

UR - https://www.scopus.com/pages/publications/84877647789

U2 - 10.3724/SP.J.1010.2013.00165

DO - 10.3724/SP.J.1010.2013.00165

M3 - 文章

AN - SCOPUS:84877647789

SN - 1001-9014

VL - 32

SP - 165

EP - 169

JO - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

JF - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

IS - 2

ER -

MEMS rectangular waveguide filter at 140 GHz

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