MEMS-based smart sensing system ("Smart Dust")

MEMS-based smart sensing system ("Smart Dust") with ultra small size and low power consumption is integrated by multi-functional sensors including information detection, process and interexchange, it also contains the composite energy system with energy harvesting system and power management programs. Such device therefore is able to work either autonomously or collaboratively. This paper is to clarify fundamentals and applications of smart dust technology, followed by its architecture design of such device. And then, focus will be given on several critical issues and technical difficulties by the development trajectory and interrelated technologies of smart dust. Finally, the feasibility to achieve such integrated multi-function sensing system with MEMS manufactory engineering techniques will be addressed.