Kinetic process and tracking control of MOEMS scanning mirror under external parameter excitation

With the development of MOEMS scanning mirror, the scanning mirror has profound applications in prospect on laser 3D image sensor by the advantages of high-speed resonance frequency and low cost for IC compatibility. It has significant theoretical and practical value to study the dynamic characteristic and control problem of MOEMS scanning mirror under external parameter excitation. According to the Euler equation, the torsional dynamical model of electrostatic actuated MOEMS was built in this paper. It was suggested by the simulation through forth-order Runge-Kutta approach when the external parameter excitation was applied in the electrostatic actuated MOEMS reverse dynamical model, the MOEMS scanning mirror should experience the process of damped, periodic, period-doubling, forking, and chaos motion. Besides, the periodic motion had a large parametric control range. According to the stabilization theory by Lyapunov, a type of continuous tracking controller for chaotic system was designed to make the torsional states of the controlled MOEMS scanning mirror convergent to arbitrary expected command signal. It is shown by the experiment that the command signal of Lissajous pattern is suitable for laser 3D image sensor; the command signal of vector diagram is suitable for laser 3D printing system. Therefore, the theoretical analysis is consistent with the experiment.