Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

Kah How Koh; Takeshi Kobayashi; Huicong Liu; Chengkuo Lee

doi:10.1016/j.proeng.2011.12.173

Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

Kah How Koh
, Takeshi Kobayashi
, Huicong Liu
, Chengkuo Lee^*

^*此作品的通讯作者

科研成果: 期刊稿件 › 会议文章 › 同行评审

5 引用（Scopus）

摘要

A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V _pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

源语言	英语
页（从-至）	701-704
页数	4
期刊	Procedia Engineering
卷	25
DOI	https://doi.org/10.1016/j.proeng.2011.12.173
出版状态	已出版 - 2011
已对外发布	是
活动	25th Eurosensors Conference - Athens, 希腊期限: 4 9月 2011 → 7 9月 2011

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10.1016/j.proeng.2011.12.173

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title = "Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator",

abstract = "A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.",

keywords = "Micro-electro-mechanical systems (MEMS), Optical MEMS, PZT, Piezoelectric actuator",

author = "Koh, \{Kah How\} and Takeshi Kobayashi and Huicong Liu and Chengkuo Lee",

year = "2011",

doi = "10.1016/j.proeng.2011.12.173",

language = "英语",

volume = "25",

pages = "701--704",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier Ltd",

note = "25th Eurosensors Conference ; Conference date: 04-09-2011 Through 07-09-2011",

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TY - JOUR

T1 - Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

AU - Koh, Kah How

AU - Kobayashi, Takeshi

AU - Liu, Huicong

AU - Lee, Chengkuo

PY - 2011

Y1 - 2011

N2 - A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

AB - A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.

KW - Micro-electro-mechanical systems (MEMS)

KW - Optical MEMS

KW - PZT

KW - Piezoelectric actuator

UR - https://www.scopus.com/pages/publications/84863164112

U2 - 10.1016/j.proeng.2011.12.173

DO - 10.1016/j.proeng.2011.12.173

M3 - 会议文章

AN - SCOPUS:84863164112

SN - 1877-7058

VL - 25

SP - 701

EP - 704

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 25th Eurosensors Conference

Y2 - 4 September 2011 through 7 September 2011

ER -

Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator

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