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Initial growth of thin films with low nucleus density and linear lateral growth rate on a substrate surface

  • Qing Yi Shao*
  • , Rong Chuan Fang
  • , Kai Gui Zhu
  • , Yuan Liao
  • , Zeng Quan Xue
  • *此作品的通讯作者
  • University of Science and Technology of China
  • Peking University

科研成果: 期刊稿件文章同行评审

摘要

Based on corrected rate equations, the kinetics is revealed for the initial growth of thin films with a low nucleus density and a linear lateral growth rate on a substrate surface. In this case, the mobility and coalescence terms in the rate equations are neglected, and the coverage term takes a dominant role. All the calculated results are in agreement with experimental data. These results introduce a new scaling in the case of dominant coverage, which is different from the those in the case of coalescence or mobility in a dominant role.

源语言英语
页(从-至)1135-1137
页数3
期刊Chinese Physics Letters
18
8
DOI
出版状态已出版 - 8月 2001
已对外发布

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