Influence of ion energies on the surface morphology of carbon films

Liu Hena Li; J. Z. Tian; X. Cai; Q. L. Chen; M. Xu; Y. Q. Wu; Ricky K.Y. Fu; Paul K. Chu

doi:10.1016/j.surfcoat.2004.08.223

Influence of ion energies on the surface morphology of carbon films

Liu Hena Li^*
, J. Z. Tian
, X. Cai
, Q. L. Chen
, M. Xu
, Y. Q. Wu
, Ricky K.Y. Fu
, Paul K. Chu

^*此作品的通讯作者

机械工程及自动化学院

Shanghai Jiao Tong University
Nanyang Technological University
Beihang University
City University of Hong Kong

科研成果: 期刊稿件 › 文章 › 同行评审

15 引用（Scopus）

摘要

Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.

源语言	英语
页（从-至）	241-245
页数	5
期刊	Surface and Coatings Technology
卷	196
期	1-3 SPEC. ISS.
DOI	https://doi.org/10.1016/j.surfcoat.2004.08.223
出版状态	已出版 - 22 6月 2005

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title = "Influence of ion energies on the surface morphology of carbon films",

abstract = "Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.",

keywords = "Carbon films, Deposition, Plasma immersion ion implantation, Surface morphology, Vacuum arc deposition",

author = "Li, \{Liu Hena\} and Tian, \{J. Z.\} and X. Cai and Chen, \{Q. L.\} and M. Xu and Wu, \{Y. Q.\} and Fu, \{Ricky K.Y.\} and Chu, \{Paul K.\}",

year = "2005",

month = jun,

day = "22",

doi = "10.1016/j.surfcoat.2004.08.223",

language = "英语",

volume = "196",

pages = "241--245",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "1-3 SPEC. ISS.",

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TY - JOUR

T1 - Influence of ion energies on the surface morphology of carbon films

AU - Li, Liu Hena

AU - Tian, J. Z.

AU - Cai, X.

AU - Chen, Q. L.

AU - Xu, M.

AU - Wu, Y. Q.

AU - Fu, Ricky K.Y.

AU - Chu, Paul K.

PY - 2005/6/22

Y1 - 2005/6/22

N2 - Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.

AB - Diamond-like carbon (DLC) films were deposited using vacuum arc deposition (VAD) and plasma immersion ion implantation and deposition (PIII and D). The surface morphologies of these films were investigated using atom force microscopy (AFM). Raman spectroscopy results show that the films have different microstructures. Based on the AFM images and Raman spectra, the aromatic ring cluster diameters hardly affect the surface morphology of the films, but the surface growth and nucleation are all subjected to the ion energies and the substrate temperature determines the surface morphology of the films.

KW - Carbon films

KW - Deposition

KW - Plasma immersion ion implantation

KW - Surface morphology

KW - Vacuum arc deposition

UR - https://www.scopus.com/pages/publications/18144397247

U2 - 10.1016/j.surfcoat.2004.08.223

DO - 10.1016/j.surfcoat.2004.08.223

M3 - 文章

AN - SCOPUS:18144397247

SN - 0257-8972

VL - 196

SP - 241

EP - 245

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1-3 SPEC. ISS.

ER -

Influence of ion energies on the surface morphology of carbon films

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