Improvement of transient response of eletrostatically actuated MEMS an state feedback viewpoint

Transient response of electrostatically-actuated MEMS is dominated by their mechanical dynamics. The performance of such system may be poor, if the natural damping of the system is very low or very high. The work mechanics of the electrostatically-actuated MEMS is discussed based on the state space method. Based on the state feedback, one input control strategy is presented to implement optimum control, which allocates poles according to the system requirements. The simulation results demonstrate that the improvement of transient behavior is achieved by proposed strategy.