@inproceedings{29b0cc0a790b46e3ada3d8e9508c54fa,
title = "High quality assembly of Liquid Crystal on Silicon (LCOS) devices for phase-only holography",
abstract = "LCOS for phase-only holography is ideally made to better optical tolerance than that for conventional amplitude modulating applications. Die-level assembly is suited to custom devices and pre-production prototypes because of its flexibility and efficiency in conserving the silicon backplane. Combined with automated assembly, it will allow high reproducibility and fast turnaround time, making a way for pre-production testing and customer sampling before mass production. Optical testing is the key element in the process. By taking into account the flatness of both the backplane and the front glass plate, we have assembled LCOS devices. We have reached our aim of less than one quarter wavelength phase distortion across the active area.",
keywords = "Die-level assembly, Liquid crystal on silicon device, Optical inspection, Phase-only spatial light modulator",
author = "Z. Zhang and Jeziorska-Chapman, \{A. M.\} and N. Collings and M. Pivnenko and J. Moore and Milne, \{W. I.\} and Crossland, \{W. A.\} and Chu, \{D. P.\}",
year = "2010",
doi = "10.1117/12.849359",
language = "英语",
isbn = "9780819480149",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Emerging Liquid Crystal Technologies V",
note = "Emerging Liquid Crystal Technologies V ; Conference date: 25-01-2010 Through 27-01-2010",
}