TY - JOUR
T1 - Heterogeneous Integration Photonic Engine Chips
T2 - Toward Miniaturized and High-Precision Optical Gyroscopes
AU - Sun, Daoxin
AU - Wang, Lingyu
AU - Lu, Zhizhou
AU - Fu, Hongmin
AU - Fan, Shijia
AU - Liu, Wenxuan
AU - Gao, Shan
AU - Pan, Yang
AU - Yu, Haipeng
AU - Liu, Jian
AU - Ren, Zhuoheng
AU - Guo, Yangchun
AU - Du, Shanshan
AU - Jin, Li
AU - Feng, Junbo
AU - Jiao, Hongchen
AU - Li, Hui
AU - Xu, Wenyuan
AU - Feng, Lishuang
N1 - Publisher Copyright:
© 1983-2012 IEEE.
PY - 2026
Y1 - 2026
N2 - As the demand for high-performance, miniaturized, and low-power devices continues to rise in integrated inertial navigation systems, chip-scale optical gyroscopes have become a central focus for the next generation of navigation sensors. This paper presents an innovative photonic engine chip based on heterogeneous integration technology, successfully implemented in an interferometric optical gyroscope (IFOG) system. The chip achieves high integration of key components—including the light source, coupler, modulator, polarization beam splitter, and photodetector—by combining silicon nitride (SiN) and thin-film lithium niobate (TFLN) materials through heterogeneous integration. This approach effectively overcomes the performance limitations inherent in traditional single-material platforms. The chip measures just 2.2mm × 10mm and, after system-level packaging, is seamlessly integrated into the gyroscope system. Experimental results demonstrate that the proposed system achieves a bias stability of 0.38°/h, significantly outperforming previously reported comparable technologies and highlighting its strong potential for high-precision inertial sensing applications. This technology not only effectively reduces system size and power consumption but also provides excellent compatibility with CMOS processes and scalability, meeting the rigorous integration and stability requirements of high-precision optical inertial navigation systems. Furthermore, it showcases the feasibility of heterogeneous photonic integration technology in the realm of high-precision inertial sensors, establishing a strong foundation for the realization of true chip-level navigation systems.
AB - As the demand for high-performance, miniaturized, and low-power devices continues to rise in integrated inertial navigation systems, chip-scale optical gyroscopes have become a central focus for the next generation of navigation sensors. This paper presents an innovative photonic engine chip based on heterogeneous integration technology, successfully implemented in an interferometric optical gyroscope (IFOG) system. The chip achieves high integration of key components—including the light source, coupler, modulator, polarization beam splitter, and photodetector—by combining silicon nitride (SiN) and thin-film lithium niobate (TFLN) materials through heterogeneous integration. This approach effectively overcomes the performance limitations inherent in traditional single-material platforms. The chip measures just 2.2mm × 10mm and, after system-level packaging, is seamlessly integrated into the gyroscope system. Experimental results demonstrate that the proposed system achieves a bias stability of 0.38°/h, significantly outperforming previously reported comparable technologies and highlighting its strong potential for high-precision inertial sensing applications. This technology not only effectively reduces system size and power consumption but also provides excellent compatibility with CMOS processes and scalability, meeting the rigorous integration and stability requirements of high-precision optical inertial navigation systems. Furthermore, it showcases the feasibility of heterogeneous photonic integration technology in the realm of high-precision inertial sensors, establishing a strong foundation for the realization of true chip-level navigation systems.
KW - integrated optics chip
KW - optical design techniques
KW - optical gyro
UR - https://www.scopus.com/pages/publications/105040262462
U2 - 10.1109/JLT.2026.3697343
DO - 10.1109/JLT.2026.3697343
M3 - 文章
AN - SCOPUS:105040262462
SN - 0733-8724
JO - Journal of Lightwave Technology
JF - Journal of Lightwave Technology
ER -