Frequency response of a square composite diaphragm under lateral pressure

On the basis of the practical structure feature of a typical micro-structure silicon pressure sensing component, which is composed of multi layer different material, this paper establishes the math model between the measured pressure, static deflection and the basic natural frequency of the above sensing component. Moreover, the laws of vibrating characteristics influenced by the geometric and material parameters of every layer were studied. And some useful results are provided, which may give theoretical basis for developing the above pressure sensing component.