Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam

Jie Shen; Ijaz Shahid; Xiao Yu; Jie Zhang; Haowen Zhong; Xiaojun Cui; Guoying Liang; Xiang Yu; Wanying Huang; Sha Yan; Gaolong Zhang; Xiaofu Zhang; Xiaoyun Le

doi:10.1016/j.nimb.2017.09.031

Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam

Jie Shen
, Ijaz Shahid
, Xiao Yu
, Jie Zhang
, Haowen Zhong
, Xiaojun Cui
, Guoying Liang
, Xiang Yu
, Wanying Huang
, Sha Yan
, Gaolong Zhang
, Xiaofu Zhang
, Xiaoyun Le^*

^*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

13 引用（Scopus）

摘要

Surface exfoliation was observed on single crystal silicon surface irradiated by Intense Pulsed Ion Beam (IPIB). As the strong transient thermal stress impact induced by IPIB was mainly attributed to the exfoliation, a micro scale model combined with thermal conduction and linear elastic fracture mechanics was built to analyze the thermal stress distribution along the energy deposition process. After computation with finite element method, J integral parameter was applied as the criterion for crack development. It was demonstrated that the exfoliation initiation calls for specific material, crack depth and IPIB parameter. The results are potentially valuable for beam/target selection and IPIB parameter optimization.

源语言	英语
页（从-至）	6-12
页数	7
期刊	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
卷	413
DOI	https://doi.org/10.1016/j.nimb.2017.09.031
出版状态	已出版 - 15 12月 2017

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Shen, J., Shahid, I., Yu, X., Zhang, J., Zhong, H., Cui, X., Liang, G., Yu, X., Huang, W., Yan, S., Zhang, G., Zhang, X., & Le, X. (2017). Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 413, 6-12. https://doi.org/10.1016/j.nimb.2017.09.031

@article{ef83a114d6ef4d5b9350d327b4871e9b,

title = "Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam",

abstract = "Surface exfoliation was observed on single crystal silicon surface irradiated by Intense Pulsed Ion Beam (IPIB). As the strong transient thermal stress impact induced by IPIB was mainly attributed to the exfoliation, a micro scale model combined with thermal conduction and linear elastic fracture mechanics was built to analyze the thermal stress distribution along the energy deposition process. After computation with finite element method, J integral parameter was applied as the criterion for crack development. It was demonstrated that the exfoliation initiation calls for specific material, crack depth and IPIB parameter. The results are potentially valuable for beam/target selection and IPIB parameter optimization.",

keywords = "Exfoliation, Finite element method, Intense pulsed ion beam, J integral, Single crystal silicon",

author = "Jie Shen and Ijaz Shahid and Xiao Yu and Jie Zhang and Haowen Zhong and Xiaojun Cui and Guoying Liang and Xiang Yu and Wanying Huang and Sha Yan and Gaolong Zhang and Xiaofu Zhang and Xiaoyun Le",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier B.V.",

year = "2017",

month = dec,

day = "15",

doi = "10.1016/j.nimb.2017.09.031",

language = "英语",

volume = "413",

pages = "6--12",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

}

Shen, J, Shahid, I, Yu, X, Zhang, J, Zhong, H, Cui, X, Liang, G, Yu, X, Huang, W, Yan, S, Zhang, G, Zhang, X & Le, X 2017, 'Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 卷 413, 页码 6-12. https://doi.org/10.1016/j.nimb.2017.09.031

TY - JOUR

T1 - Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam

AU - Shen, Jie

AU - Shahid, Ijaz

AU - Yu, Xiao

AU - Zhang, Jie

AU - Zhong, Haowen

AU - Cui, Xiaojun

AU - Liang, Guoying

AU - Yu, Xiang

AU - Huang, Wanying

AU - Yan, Sha

AU - Zhang, Gaolong

AU - Zhang, Xiaofu

AU - Le, Xiaoyun

PY - 2017/12/15

Y1 - 2017/12/15

N2 - Surface exfoliation was observed on single crystal silicon surface irradiated by Intense Pulsed Ion Beam (IPIB). As the strong transient thermal stress impact induced by IPIB was mainly attributed to the exfoliation, a micro scale model combined with thermal conduction and linear elastic fracture mechanics was built to analyze the thermal stress distribution along the energy deposition process. After computation with finite element method, J integral parameter was applied as the criterion for crack development. It was demonstrated that the exfoliation initiation calls for specific material, crack depth and IPIB parameter. The results are potentially valuable for beam/target selection and IPIB parameter optimization.

AB - Surface exfoliation was observed on single crystal silicon surface irradiated by Intense Pulsed Ion Beam (IPIB). As the strong transient thermal stress impact induced by IPIB was mainly attributed to the exfoliation, a micro scale model combined with thermal conduction and linear elastic fracture mechanics was built to analyze the thermal stress distribution along the energy deposition process. After computation with finite element method, J integral parameter was applied as the criterion for crack development. It was demonstrated that the exfoliation initiation calls for specific material, crack depth and IPIB parameter. The results are potentially valuable for beam/target selection and IPIB parameter optimization.

KW - Exfoliation

KW - Finite element method

KW - Intense pulsed ion beam

KW - J integral

KW - Single crystal silicon

UR - https://www.scopus.com/pages/publications/85030704124

U2 - 10.1016/j.nimb.2017.09.031

DO - 10.1016/j.nimb.2017.09.031

M3 - 文章

AN - SCOPUS:85030704124

SN - 0168-583X

VL - 413

SP - 6

EP - 12

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam

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