@inproceedings{62505232aaa640958f80fa4e1bd7cb09,
title = "Fiber micro-vibration readout sensor based on MOEMS",
abstract = "To measure the vibration of micro-structure, a scheme of sensor based on MOEMS (Micro-Optic-Electro-Mechanical System) with fiber-optic readout was proposed , and its mathematical model was deduced. Single-fiber readout structure and a micro-structure fixed in the front of the sensor were used. The micro-structure vibrated as the measured object moved, and its vibration caused the change of light intensity. The sensor detected vibration displacement by receiving the light intensity. As a result of single-fiber structure and parameters optimization of micro-structure, compared with other fiber readout structures, this system has the advantages of high sensitivity and miniaturization which is easier to match with fiber system because of single-fiber structure and parameters optimization of micro-structure. The response behaviors of the system to the piezoelectric ceramics excitation were studied through the experiments. And it could detect the vibration displacement of 0.18nm.",
keywords = "Fiber, Micro-optic-electro-mechanical system, Reflective intensity, Vibration sensor",
author = "Rui Li and Wen Xiao and Dewen Liu and Yu Cui",
year = "2007",
doi = "10.1117/12.725507",
language = "英语",
isbn = "0819463493",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "27th International Congress on High-Speed Photography and Photonics",
note = "27th International Congress on High-Speed Photography and Photonics ; Conference date: 17-09-2006 Through 22-09-2006",
}