Fast fabrication of single-substrate inorganic all-solid state smart window device based on WO₃ and NiO_x and study on its performance

In this paper we introduce a effective method to prepare amorphous-porous WO₃, amorphous LiNbO₃, and nano-microcrystalline NiO_x films by magnetron sputtering and a cooling apparatus based on liquid nitrogen. Therefore, using the cooling apparatus, We have fabricated single-substrate inorganic all-solid state smart window device consisting of G/ITO/NiO_x/LiNbO₃/WO₃/ITO. The experimental results show that in the visible range between 400 and 800 nm, transmittance average of its bleached state after 1000th cycle is 63.0%, whereas transmittance average of its colored state after 1000th cycle is 10.6%. This preliminary work indicates that the method of cooling substrate should be a effective means to fabricate inorganic all-solid state smart window device having excellent electrochromic performance.