TY - GEN
T1 - Fabrication of Mems Bulk Sic-Based Accelerometer and its Application in Ground Test of Aero-Engine
AU - Zhai, Yanxin
AU - Xu, Tiantong
AU - Xu, Guoqiang
AU - Wang, Hengyi
AU - Cao, Xiaoda
AU - Li, Haiwang
N1 - Publisher Copyright:
© 2023 IEEJ.
PY - 2023
Y1 - 2023
N2 - This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ωum, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.
AB - This paper reports a MEMS accelerometer based on bulk SiC. The fabrication and packaging scheme were designed, an efficient signal processing circuit was built, and the output performance of the sensor was tested. The test results show that the resistivity of the piezoresistive material is 194.40 Ωum, the sensor's output sensitivity is 0.21 mV/g, the linearity is 99.8%, and the resonance frequency is 1636 Hz. Finally, the accelerometer was applied to the two ground vibration tests of aero-engine, and the vibration signal of the turbine components and the test bed was successfully extracted.
KW - MEMS
KW - accelerometer
KW - aero-engine applications
KW - silicon carbide
UR - https://www.scopus.com/pages/publications/85176603128
M3 - 会议稿件
AN - SCOPUS:85176603128
T3 - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
SP - 2050
EP - 2053
BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Y2 - 25 June 2023 through 29 June 2023
ER -