Fabrication of atomic vapor cell chip for MEMS atomic spin-polarized gyroscope

Atomic spin gyroscope is based on the atomic spin-polarized effect, which has the potential to measure rotation precisely in a small volume, or even on a chip. The atomic vapor cell for spin gyroscope requires high density compensation gas, which is polarized by spin-exchange and used to compensate the magnetic field. A special bonder is designed with maximum pressure up to 20 atm. A fabrication process is designed in which the RF coil is deposited on a glass wafer instead of using an assembly. The atomic vapor cell chip with gas pressure density of 6 amagats is fabricated and the tested leakage rate is about 3.0 × 10^-8 Pa · m³/s. The final structure and leakage rate measurement verify the feasibility of the special bonder and the process.