Fabrication of AI microspheres by utilizing electromigration

Yuxin Sun; Hironori Tohmyoh; Masumi Saka

doi:10.1166/jnn.2009.444

Fabrication of AI microspheres by utilizing electromigration

Yuxin Sun^*
, Hironori Tohmyoh
, Masumi Saka

^*此作品的通讯作者

Tohoku University

科研成果: 期刊稿件 › 文章 › 同行评审

13 引用（Scopus）

摘要

Aluminum microspheres with diameters of 4-7 μm have been fabricated by utilizing electromigration. In a passivated AI line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific ranqe of the temperature at the anode end of AI line.

源语言	英语
页（从-至）	1972-1975
页数	4
期刊	Journal of Nanoscience and Nanotechnology
卷	9
期	3
DOI	https://doi.org/10.1166/jnn.2009.444
出版状态	已出版 - 3月 2009
已对外发布	是

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title = "Fabrication of AI microspheres by utilizing electromigration",

abstract = "Aluminum microspheres with diameters of 4-7 μm have been fabricated by utilizing electromigration. In a passivated AI line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific ranqe of the temperature at the anode end of AI line.",

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author = "Yuxin Sun and Hironori Tohmyoh and Masumi Saka",

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AU - Tohmyoh, Hironori

AU - Saka, Masumi

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N2 - Aluminum microspheres with diameters of 4-7 μm have been fabricated by utilizing electromigration. In a passivated AI line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific ranqe of the temperature at the anode end of AI line.

AB - Aluminum microspheres with diameters of 4-7 μm have been fabricated by utilizing electromigration. In a passivated AI line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific ranqe of the temperature at the anode end of AI line.

KW - Aluminum

KW - Electromigration

KW - Microsphere

KW - Passivation layer

KW - Surface tension

UR - https://www.scopus.com/pages/publications/67649228344

U2 - 10.1166/jnn.2009.444

DO - 10.1166/jnn.2009.444

M3 - 文章

AN - SCOPUS:67649228344

SN - 1533-4880

VL - 9

SP - 1972

EP - 1975

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

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ER -

Fabrication of AI microspheres by utilizing electromigration

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