Error analysis and integrated compensation of scale factor for MEMS gyroscope

In dynamic condition, scale factor error is one of the main errors for MEMS (micro electromechanical system) gyroscopes. For the sake of improving performance of the MEMS gyroscope, the physical origin of bias, nonlinear and asymmetry error of scale factor were analyzed. Based on the operational principle of MEMS gyroscope driven by the inner frame, mathematical error model of scale factor for MEMS gyroscope was designed. According to the angular velocity of gyroscope, the method to compensate scale factor was proposed so as to eliminate scale factor error caused by angular rate. The experimental results show that the scale factor original error of gyroscope is 4053.2(°)/h(1σ) and error compensated by the integrated compensation method is improved to 79.0(°)/h(1σ). Compared with the methods of least square and segmented compensation, the precision of gyroscope compensated by the integrated method is improved 15.4 and 7.5 times respectively. The accuracy of the theories model is verified and a theoretical foundation for future practical application is provided.