Embossing of polymers using a thermosetting polymer mold made by soft lithography

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17 引用（Scopus）

源语言	英语
页（从-至）	1318-1322
页数	5
期刊	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
卷	21
期	4
DOI	https://doi.org/10.1116/1.1585066
出版状态	已出版 - 2003
已对外发布	是

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title = "Embossing of polymers using a thermosetting polymer mold made by soft lithography",

author = "Rubo Xing and Zhe Wang and Yanchun Han",

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AU - Wang, Zhe

AU - Han, Yanchun

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